Gas Abatement - Wet type

Category :Abatement systems,

Abatement of semiconductor and display process exhaust stream using water. | Water soluble gas (HCl, HF, NH3, etc.) | Versatile due to its large flow capacity and multiple inlet ports - wet bench exhaust treatment to small lab house scrubber. | Multi-stage water scrubber provides high solids and abatement efficiency | Solids handling features extend PM interval.

Abatement of semiconductor and display process exhaust stream using water. | Water soluble gas (HCl, HF, NH3, etc.) | Versatile due to its large flow capacity and multiple inlet ports - wet bench exhaust treatment to small lab house scrubber. | Multi-stage water scrubber provides high solids and abatement efficiency | Solids handling features extend PM interval.

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