Gas Cabinet
Category :Gas delivery systems,
A wide range of cabinets, controllers and panels can be configured into a system engineered to match your needs. In addition, an extensive list of options are available to meet the industry standards in nearly every gas system. Gas Distribution Systems have a proven record for semiconductor applications with 99.999% uptime. We also provides custom systems and solutions in circumstances where standard configurations are not sufficient.
Technical features
Compatible with all types of cylinder
Auto switch for continuous supply
Automatic purge sequences for cylinder change and maintenance
Real-time information with user-friendly HMI
Ethernet Communication
Programmable Logic Controller with a color touch screen
Options
Dedicated purge panel
Weight scale for liquefied gas level monitoring
Double containment pipe pressure management
Detoxal Cartridge
Start-up, site acceptance test and training
Controller Options
Fully automated
Semi automated with automatic switch over
Manual switch with automatic cylinder changeovers
Cabinet Options
1,2 and 3 cylinder gas cabinet with or without purge panel
Safety features
Exhaust flow alarm
Excess flow switch (EFS)
UV/IR sensor
Temperature sensor (ROR)
Coax monitoring
Leak sensor
Smoke detector
Door interlocks
Remote shutdown relays
Emergency off (EMO)
Sprinklers
Line and cylinder heat
Cool (Chiller)
A wide range of cabinets, controllers and panels can be configured into a system engineered to match your needs. In addition, an extensive list of options are available to meet the industry standards in nearly every gas system. Gas Distribution Systems have a proven record for semiconductor applications with 99.999% uptime. We also provides custom systems and solutions in circumstances where standard configurations are not sufficient.
Product Details
Additional Info
Images