Liquid Delivery Systems (LDS)
Category :Gas delivery systems,
The Liquid Delivery System is a chemical distribution system designed to maximize efficiency and performance. The self-contained system includes redundant panels with auto-crossover capability for uptime greater than 99.9%. The small footprint with large process capacity is intended for the distribution of liquid chemicals via a push gas. On day-tank-type systems, the liquid level has a linear indication for consistent level monitoring. High-precision scale options offer grams per run for tight process control. PLC components are consistent with our line of gas cabinets and VMB controllers to minimize spare parts inventory. The LDS is a fully automatic system for maximum safety and performance.
The Liquid Delivery System is a chemical distribution system designed to maximize efficiency and performance. The self-contained system includes redundant panels with auto-crossover capability for uptime greater than 99.9%. The small footprint with large process capacity is intended for the distribution of liquid chemicals via a push gas. On day-tank-type systems, the liquid level has a linear indication for consistent level monitoring. High-precision scale options offer grams per run for tight process control. PLC components are consistent with our line of gas cabinets and VMB controllers to minimize spare parts inventory. The LDS is a fully automatic system for maximum safety and performance.
Product Details
Additional Info
Images
Technical features
Dedicated purge panel
Weight scale for liquefied gas level monitoring
Pigtail box for a remote purge near the source
PLC-based control with touch-screen interface for reliable operation
Complete startup, canister and line purge routines with proven safe performance
Adjustable shelf for different canister options up to 20 liter
Semi-compliant system and controller
Tool interface for System OK, Request Chem and/or Purge
Typical systems process applications, including life safety alarm monitoring
BPSG: TEOS, TEB, TEPO
High-k dielectrics: 4MS, DMPS, DMDMOS, TMCTS
Low-k dielectrics: TDMAS, TMA
Cabinet Options
Superior construction using 11-gauge coldrolled steel, a polyester powder coating for superior corrosion resistance and an all-welded inner enclosure for canister containment
Cabinet louvers eliminate dead or trapped vapor areas
Doors – Enclosure gasket and reliable hinges for years of trouble-free service
Exhaust sensor – Alarm can initiate chemical shutdown or offer warning with non-shutdown audible alarm or remote alarm as needed
Life safety relay logic to override PLC for fire, leak, toxic and facility shutdowns with relay feedback
Fire sensor, ROR or UV/IR, sprinkler head
110% canister leak containment
System Options
Push-gas regulation for consistent delivery pressure
Multiple outlet configurations with tool interface
Vacuum pump
De-gas units
High-flow systems
Day tank for continued process during canister change
Linear-level sensor in day tank for real-time level indication
Auto-crossover systems for system redundancy and increased uptime
High-precision scales for grams-per-run information
Automatic canister refill from bulk supply canisters
Controller-redundant power supplies, solenoid valves or PLC
PLC hold last state Touch-Screen Display
10.4” full-color display for high visibility
Provides a graphical display of the entire panel
Shows valve status during normal operation, purging and manual modes