Slurry Dispense Module

Category :Chemical delivery systems,

The Slurry Dispense Module is designed to deliver slurry containing submicron abrasive particles and chemical reagents to Chemical Mechanical Planarization process tools. With the aim of minimizing surface defects to ensure effective polishing, the system comes with built-in filters with excellent retention of agglomerates while allowing desired slurry particles to pass through and reach the wafer surface. The system design and component selection involve meticulous engineering to provide high levels of efficiency and reliability. The system is commonly paired with our Slurry Transfer Unit and a day tank to provide a continuous supply of slurry for high consumption. The system is integrated with modern and precise metrology to ensure that only high-quality slurry is delivered consistently.

Product Details

Additional Info

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Standard Features

Fully-automated pump switchover function for uninterrupted slurry delivery
Automatic system shutdown from hardware safety interlocks
Automatic slurry quality analysis during delivery (online metrology)
Loop pressure monitoring and control to ensure constant pressure at point of use
Optimal piping layout and design
Centrifugal pump for high-flow applications
Redundant pumps and filters
Automatic pump and filter priming
Automatic system flushing and purging
Differential pressure monitoring across filters
Humidified N2 for drum or tote blanketing
UPW or UN2 spray gun
Auxiliary media pressure sensors for pneumatic system

Safety Features

Isolated process and electrical enclosures
CDA-purge function for electrical enclosure
Audible and visual alarms and warnings
Local and remote EMO
Exhaust flow detection
Cabinet leak detection
Utility service leak detection
Door interlock system
Failure Modes and Effects Analysis (FMEA)

System Control

Siemens SIMATIC S7 series PLC
Siemens SIMATIC Comfort Panel HMI
User authorisation and password protection HMI
Multilingual operational guide on HMI
Manual actuation of pneumatic valves
Linkage to supervisory control and data acquisation (SCADA) system for remote system monitoring and control

Optionss

Diaphragm pump with pulsation dampeners, stroke counter and leak detection
Fab-wide slurry recirculation with temperature monitoring and control
Day tank capacity up to 2000 L
Day tank enclosure
High-precision radar sensor for day tank
Pressure and flow indicators at pump outlet
Loop consumption monitoring
FM4910 Fire Retardant Plastics enclosure
Manual system flushing and purging